MKS Granville Phillips 製程控制模組,307 真空計控制器的 6 個設定點。編號:307017

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MKS Granville Phillips 製程控制 6 個設定點模組,適用於 MKS Granville Phillips 307 真空計控制器
MKS Granville Phillips 零件號:307017
這是 MKS Granville Phillips 製程控制模組,為 307 真空計控制器提供單刀雙擲繼電器,可透過(6 個數位設定點)或內建手冊進行控制超越開關。此過程控制模組有 6 個使用者可選通道。前 2 個通道分配給離子真空計。如果存在,通道 3 和 4 分配給 CGA 或 TCA; 5和6至CGB、TCB或CMB。提供開關將通道 1 分配給 IG1、IG2 或兩者;通道 2 也是如此。有關製程控制卡(模組)的安裝步驟,請參閱說明手冊.pdf 第 16-27 頁。規格及使用方法請參考使用說明書第5章。 這僅是製程控制卡模組(帶有6 個設定點),MKS Granville Phillips 307 控制器、電纜和配件在此網站上單獨出售。手冊.pdf 可在下載地址下載:

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